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  • Gianluca Piazza
  • Changting Xu

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Project TitleSub-mW Ovenization of Aluminum Nitride MEMS Resonators
Track Code2015-331
Short DescriptionThe present invention relates to a new ovenization method for aluminum nitride (AIN) MEMS resonator that enables devices heating from -40°C to +85°C with a power consumption as low as 368μW - the lowe
AbstractThe present invention relates to a new ovenization method for aluminum nitride (AIN) MEMS resonator that enables devices heating from -40°C to +85°C with a power consumption as low as 368μW - the lowest ever recorded for a MEMS resonator. The same resonators exhibit quality factors (Q) as high as 4,459. Ovenization of piezoelectric resonators has been limited by two main challenges: (i) RF power delivery through metal lines reduces achievable thermal resistance; (Ii) incorporation of resistive heaters In the resonator body Increases mechanical damping. In this work, RF power delivery Is decoupled from resonator supporting beams, hence alleviating the trade-off between thermal resistance and Q-factor; moreover, heaters are placed externally to the resonator body, hence eliminating the deleterious effects of the heaters on the acoustic properties of the device. More importantly, this ovenization technique is independent of the resonator geometry, so it is broadly applicable to any resonator frequency (70MHz to 1.16GHz in this work). This demonstration constitutes a fundamental stepping stone In enabling temperature stable oscillators with extremely low power consumption. Main points of the innovation are: . Decoupling radio frequency (RF) power delivery from resonator heating to alleviate the trade-off between the series resistance for the resonator and the thermal resistance . RF paths are composed of only a thin metal layer . Heaters are placed around resonators symmetrically, rather than under resonators directly, which enables uniform heating . Resonator heater path is designed to simultaneously yield a mechanically stable and thermally isolating supporter (Folded suspension) . Balanced resistive network for TCF compensation in Wheatstone bridge
 
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Posted DateMar 4, 2016 2:27 PM

Researcher

Name
Changting Xu
Gianluca Piazza

Manager

Name
David Graham